JOURNAL PAPERS
E.J. Eklund, A.M. Shkel, S. Knappe, E. Donley
and J. Kitching, "Glass-blown spherical microcells for chip-scale atomic devices," Sensors and Actuators A: Physical, Vol. 143, Issue 1, pp. 175-180, 2008 [PDF]
E.J. Eklund and A.M. Shkel, "Glass Blowing
on a Wafer Level," Journal of Microelectromechanical
Systems, Vol. 16, No. 2, pp. 232-239, 2007 [PDF]
E.J. Eklund and A.M. Shkel, "Single-mask
fabrication of high-G piezoresistive accelerometers with extended
temperature range," Journal of Micromechanics and Microengineering,
Vol. 17, No. 4, pp. 730-736, 2007 [PDF]
E.J. Eklund and A.M. Shkel, "Factors affecting
the performance of micromachined sensors based on Fabry-Perot
interferometry", Journal of Micromechanics and Microengineering,
Vol. 15, No. 9, pp. 1770-1776, 2005 [PDF]
CONFERENCE PAPERS
E.J. Eklund, A.M. Shkel, S. Knappe, E. Donley, and J. Kitching, "Spherical Rubidium Vapor
Cells Fabricated by Micro Glass Blowing," IEEE International
Conference on Micro Electro Mechanical Systems (MEMS 2007),
pp. 171-174, 2007 [PDF]
E.J. Eklund and A.M. Shkel, "Single-Mask SOI
Fabrication Process for Linear and Angular Piezoresistive
Accelerometers with On-Chip Reference Resistors", IEEE
Sensors 2005, pp. 656-659 [PDF]
M. Perez, E.J. Eklund and A.M. Shkel,
"Designing Micromachined Accelerometers with Interferometric
Detection", IEEE Sensors 2005, pp. 652-655 [PDF]
E.J. Eklund and A.M. Shkel, "Performance Tradeoffs
in MEMS Sensors with High-Finesse Fabry-Perot Interferometry
Detection", NSTI Nanotech 2005, pp. 533-536, May 2005
[PDF]
PATENTS
E.J. Eklund, M.C. Rivers, and A.M. Shkel, "Folded Micro-Gyroscope with Nuclear Magnetic Resonance Sensing," Patent pending, UC Case No. 2008-125
J. Kitching, E. Donley, A.M. Shkel, E.J. Eklund, and E. Hodby, "Compact Atomic Magnetometer and Gyroscope Based on a Diverging Laser Beam," Patent pending, UC Case No. 2008-002
E.J. Eklund and A.M. Shkel, "Glass Blowing
on a Wafer Scale", Patent pending, UC Case No. 2006-519
E.J. Eklund and A.M. Shkel, "Wafer-Level Micro-Glass-Blowing",
Patent pending, UC Case No. 2006-176, U.S. Patent Application 2007/0071922
E.J. Eklund and A.M. Shkel, "Single-Mask Fabrication
Process for Linear and Angular Piezoresistive Accelerometers",
Patent pending, UC Case No. 2006-030, U.S. Patent Application 2007/0084041
E.J. Eklund and A.M. Shkel, "Assembly Process
for Out-of-Plane MEMS and Three-Axis Sensors", Patent
pending, UC Case No. 2006-029, U.S. Patent Application 2007/0087474
M.S. THESIS
E.J. Eklund, "Micromachined Optical Sensors utilizing
Embedded Fabry-Perot Cavity for High-Resolution Detection",
M.S. Thesis, University of California, Irvine, 2005 [PDF] |
